Axel Miranda

Mechanical engineering

Hometown: San Luis, Arizona, United States

Graduation date: Spring 2025

Additional details: First-generation college student

FURI Semiconductor Research theme icon

FURI | Spring 2025

Understanding the Effect of Metallic Seed Layers on the Crystallization of Amorphous NiTi Thin Films

NiTi films are widely used as sensors, actuators, and switches in microelectromechanical systems (MEMS). The high-temperature annealing required to crystallize the NiTi films leads to undesirable thermal stresses and fabrication inefficiencies in MEMS. This project seeks to reduce the crystallization temperature of amorphous NiTi films using carefully selected metallic seed layers. The proposed research will test different metallic seed layers with low/high lattice mismatch to determine their effects on crystallization temperature and kinetics. This approach can help systematically control the crystallization temperature of NiTi films, leading to faster and more energy-efficient MEMS fabrication and fewer post-fabrication failures.

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