FURI | Fall 2025

Spray-coated Thin Film Barriers for Improved Environmental Durability of Transistors

Environmental degradation remains an ongoing concern in the semiconductor packaging industry, as it compromises product lifespan. To address this, devices are coated with a thin film aluminum oxide barrier to reduce water vapor permeation and protect against performance degradation or conductivity loss. A cost-effective open-air spray coater is used to deposit aluminum nitrate onto the surface of an oxide thin film transistor. Once annealed, the aluminum nitrate converts to a dense aluminum oxide layer that maintains constant electrical conductivity in the underlying transistor, even under extreme environmental conditions such as submersion in boiling water.